Layer thickness measurements from 50 nm up, in 25 ms on a 50 µm Ø surface

Auto-focus controlled positioning on axes X, Y and Z, as well as rotation

Storage of 500 x 250 µm microscope images of silicone layer

Calibration and inspection of thickness measurement using traceable standards

Software with user hierarchy and data storage adherent to 21 CFR Part 11 standards and programmed according to GAMP IV

IQ, OQ and PQ documentation package

Global service and distribution